Optical metrology · Software development · Image processing

Optical metrology · Software development · Image processing

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OEG GmbH

OEG GmbH

OEG GmbH

Fully automatic contact angle meter for silicon wafers up to 12 inch

 

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SURFTENS HL automatic

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SURFTENS HL automatic

The professional solution for contact angle measurement in semiconductor technology

Features

The contact angle measuring system SURFTENS HL automatic is designed for use in semiconductor industry and research, in particular for process control of wafer coating and in the photolithographic process.

 

It is characterized by the following features:

- fully automatic contact angle mappings

- space-saving construction

- motorized wafer table x/phi for automatic sample positioning

- motorized, automatic dosing unit

- automatic drop placement

- software controls fully automatic measuring sequence

- comfortable documentation of the measuring results in protocols and in the video images

 

 

 

 

 

 

 

 

 

 

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SURFTENS HL automatic

 

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